Calibration and Test Specimens
- Calibration Specimens:
Model 300-1D, 700-1D, 700-2D: high precision 0.3 and 0.7 micron pitch, one
and two dimensional gratings. 150-1D, one dimensional grating with 145 nm pitch. 301BE and
292UTC, one dimensional grating with 292 nm pitch and low surface and
edge roughness. New:
70-1D high precicion 70 nm pitch one dimensional grating.
- High Durability calibration
specimen
: Model 750-HD: 0.75 micron pitch
- Model PT
- Phase Imaging Test Specimen (verify TappingMode™ phase contrast and resolution)
- Traceable Nanometer Calibration
Specimens
- Specimens available unmounted, mounted on steel
disks, or mounted on SEM mounts.
Need a scanner? See our equipment
list.
Request information.
Back to ASM home page.
Trademark and copyright notices
updated 03/17/2009
Search this site