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ASM discusses SPM Automation 1998
A Process for Automating High Precision Disc Inspection using the Atomic Force Microscope
Donald A. Chernoff and David L. Burkhead
This talk will be presented on Thursday Oct. 29 in
the session from 1000-1130 AM. Other talks in that session are:
Automated, High Precision Measurement of Critical Dimensions using the Atomic Force Microscope
Session:NS-ThP (Nov. 5, 1998, 530 - 7pm)
D.A. Chernoff and D.L. Burkhead
Abstract: Atomic Force Microscopes are used in many industries for research, engineering and process control. Until now, AFM operators have usually made dimensional measurements of sub-micron features by manually placing cursors on images or cross-section plots. Time constraints and operator fatigue limit the number of measurements. This in turn limits the extent of statistical analysis. We have developed a high accuracy measurement process which overcomes these limitations.
On DVDs (Digital Versatile Discs), the smallest features
are about 400 nm long, 320 nm wide, 120 nm high, with a track pitch of
740 nm. We use a specific data capture protocol and automated image analysis
to measure the following parameters: track pitch1,2,3,
bump height, bump width (at various threshold levels), bump length, and
four sidewall slope angles. In a single 10x10 micron image of a DVD stamper,
containing about 100 bumps, we tabulate about 1000 values. It is useful
to pool the data from several images. In a plot of bump width vs. bump
length, we see that width at half height increases from 315 nm for the
shortest bumps (420 nm long) to about 380 nm for bumps longer than 1100
nm; this matches the increase seen for corresponding optical signals produced
when a finished disc is played. Where sidewall angle deviates from the
norm, we are able to review the image data to identify the specific nature
of the defect.
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